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The preparation method of terahertz monolithic integrated device
Author(s): Cong Zhang; Bo Su; Jingsuo He; Hongfei Zhang; Yaxiong Wu; Shengbo Zhang; Cunlin Zhang
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Paper Abstract

The terahertz monolithic integrated device is to integrate the pumping area of the terahertz generation, the detection area of the terahertz receiving and the metal waveguide of terahertz transmission on the same substrate. The terahertz generation and detection device use a photoconductive antenna structure,the metal waveguide use a microstrip line structure. The evanescent terahertz-bandwidth electric field extending above the terahertz transmission line interacts with, and is modified by, overlaid dielectric samples, thus enabling the characteristic vibrational absorption resonances in the sample to be probed. In this device structure, since the semiconductor substrate of the photoconductive antenna is located between the strip conductor and the dielectric layer of the microstrip line, and the semiconductor substrate cannot grow on the dielectric layer directly. So how to prepare the semiconductor substrate of the photoconductive antenna and how to bond the semiconductor substrate to the dielectric layer of the microstrip line is a key step in the terahertz monolithic integrated device. In order to solve this critical problem, the epitaxial wafer structure of the two semiconductor substrates is given and transferred to the desired substrate by two methods, respectively.

Paper Details

Date Published: 12 January 2018
PDF: 8 pages
Proc. SPIE 10623, 2017 International Conference on Optical Instruments and Technology: IRMMW-THz Technologies and Applications, 106230G (12 January 2018); doi: 10.1117/12.2295156
Show Author Affiliations
Cong Zhang, Capital Normal Univ. (China)
Bo Su, Capital Normal Univ. (China)
Jingsuo He, Capital Normal Univ. (China)
Hongfei Zhang, Capital Normal Univ. (China)
Yaxiong Wu, Capital Normal Univ. (China)
Shengbo Zhang, Capital Normal Univ. (China)
Cunlin Zhang, Capital Normal Univ. (China)


Published in SPIE Proceedings Vol. 10623:
2017 International Conference on Optical Instruments and Technology: IRMMW-THz Technologies and Applications
Cunlin Zhang; Xi-Cheng Zhang; Zhiming Huang; Liquan Dong, Editor(s)

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