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Nanoimprint lithography using gas permeable template II
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Paper Abstract

We have been trying to improve nanoimprint lithography performance through modification of template materials. We have reported a biomass based template with gas permeability which decreases transcriptional defects on template materials caused by involved solvents and cracked gasses generated from imprinted materials. (SPIE2016 and 2017) The line patterning results using the biomass based gas permeable template were better to reduce the line pattern failure as compared with that of quartz based template as the standard reference. In this study, we will report a mechanical property improvement of the template by blending cellulose nanofiber (CNF) to the biomass template. The blended template showed improved gas transmission coefficient and mechanical properties than non-blended template. The proposed nanoimprint lithography using biomass based template with gas permeable and gaseous adsorption is one of the most promising processes ready to use for mass-production of nanoscale devices.

Paper Details

Date Published: 19 March 2018
PDF: 9 pages
Proc. SPIE 10584, Novel Patterning Technologies 2018, 1058415 (19 March 2018); doi: 10.1117/12.2295147
Show Author Affiliations
Makoto Hanabata, Toyama Prefectural Univ. (Japan)
Satoshi Takei, Toyama Prefectural Univ. (Japan)
Shinya Nakajima, Toyama Prefectural Univ. (Japan)
Naoto Sugino, Sanko Gosei Ltd. (Japan)
Yoko Matsumoto, Litho Tech Japan Co., Ltd. (Japan)
Atsushi Sekiguchi, Litho Tech Japan Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 10584:
Novel Patterning Technologies 2018
Eric M. Panning, Editor(s)

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