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Proceedings Paper

Structural change characteristics of the vapour deposited Al-Cu alloy films
Author(s): Haibo Yan
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Paper Abstract

Structural changes of vapour quenched Al-Cu films induced both by thermal and pulse laser annealing were investigated. An unique crystallization was observed and a structural change mechanism was discussed based on the results.

Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12306T (1 July 1990); doi: 10.1117/12.2294882
Show Author Affiliations
Haibo Yan, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1230:
International Conference on Optoelectronic Science and Engineering '90
DaHeng Wang, Editor(s)

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