Share Email Print
cover

Proceedings Paper

Development of a lasers sphere-surface interferometer
Author(s): Yan Guo
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The laser sphere-surface interferometer is mainly composed of spherical interference system, the interference system for length measuring and electronic counting display.

Paper Details

Date Published: 1 July 1990
PDF: 1 pages
Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12304A (1 July 1990); doi: 10.1117/12.2294791
Show Author Affiliations
Yan Guo, Precision Measuring Technology Institute (China)


Published in SPIE Proceedings Vol. 1230:
International Conference on Optoelectronic Science and Engineering '90
DaHeng Wang, Editor(s)

© SPIE. Terms of Use
Back to Top