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Proceedings Paper

The basic operation principle of measurement system of a phase grating of non-Moire fringe, single-grating and modulation of multiphase light
Author(s): Zengyao Zhang
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Paper Abstract

This paper presents a new type of grating measuring system. Its light source is encoded multiphase pulse linear arry light source. It only has a scale grating with wide pitch, does not use Moire fringe, and only has a single-ended output. Its signal process system uses frequency tracking measurement circuit. this paper centred on analysis the basic operation principle of measurement system, also explained the function of filter and demodulation of the silicon photoelectric generator to output signal I(x,t) by use of transfer function and amplitude-frequency characteristic of the silicon photoelectric generator from automatic control theory.

Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12302I (1 July 1990); doi: 10.1117/12.2294727
Show Author Affiliations
Zengyao Zhang, China Institute of Metrology (China)


Published in SPIE Proceedings Vol. 1230:
International Conference on Optoelectronic Science and Engineering '90
DaHeng Wang, Editor(s)

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