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Proceedings Paper

Coarse grating precision displacement measuring system with opto-scanner
Author(s): Xianghui Yuan
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Paper Abstract

A coarse grating precision displacement measuring system is described in the paper. The system consists of an opto-scanner used as a displacement sensor, a simple optical system, a large pitch reflecting coarse grating (X=0.635mm) and signal processing circuits etc. After describing the opto-scanner briefly, the paper expounds the principle of the system, the schematic circuits and the theory of dynamic phase discriminating and subdivision. Experiment results is satisfactory.

Paper Details

Date Published: 1 July 1990
PDF: 3 pages
Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12301U (1 July 1990); doi: 10.1117/12.2294703
Show Author Affiliations
Xianghui Yuan, Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 1230:
International Conference on Optoelectronic Science and Engineering '90
DaHeng Wang, Editor(s)

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