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Proceedings Paper

Optical properties and annealing behaviors of amorphous silicon phosphorus alloy films
Author(s): Jianping Zhou
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Paper Abstract

Based on the structural analysis of a-SiP:H alloy films prepared by the GD method, we have investigated their optical gap and refractive index as a function of compositions,and report here a preliminary study of their change rules of reflectivity and absorption in the processes of optical characteristic change and phase change, respectively.

Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12300P (1 July 1990); doi: 10.1117/12.2294662
Show Author Affiliations
Jianping Zhou, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1230:
International Conference on Optoelectronic Science and Engineering '90
DaHeng Wang, Editor(s)

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