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Microwave characterization of graphene using an improved on-wafer calibration method
Author(s): Z. Awang; M. H. Kara; N. A. A. Rahim
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Paper Abstract

We report here the characterization of graphene at microwave frequencies using an improved on-wafer calibration method which did not require 50 Ω loads. Multi-layer graphene films about 3 nm thick were grown on Ni-coated Si wafers using TCVD. Co-planar transmission lines of dimension 250 μm × 30 μm were constructed from the graphene films. Scattering parameters up to 20 GHz were measured using on-wafer probes, and SOLT (short-open-load-thru), LRM (load-reflect-match) and TRL (thru-reflect-line) on-wafer calibration methods were used to enable comparison. The microwave properties were modeled by a physics-based resistor-inductor-capacitor (RLC) lumped element equivalent circuit, frm which the conductivity of bi-layer and multi-layer graphene was extracted. Our study showed modeling using TRL is more accurate, and the conductivity of graphene extracted from our model was found to be 3.2 ×104 S/m, which is better than those reported by others. Our work revealed improved graphene characterization at high frequencies since a better calibration was used here.

Paper Details

Date Published: 23 March 2018
PDF: 11 pages
Proc. SPIE 10597, Nano-, Bio-, Info-Tech Sensors, and 3D Systems II, 105970E (23 March 2018); doi: 10.1117/12.2294506
Show Author Affiliations
Z. Awang, Univ. Teknologi MARA (Malaysia)
M. H. Kara, Univ. Teknologi MARA (Malaysia)
N. A. A. Rahim, Univ. Teknologi MARA (Malaysia)

Published in SPIE Proceedings Vol. 10597:
Nano-, Bio-, Info-Tech Sensors, and 3D Systems II
Vijay K. Varadan, Editor(s)

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