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Proceedings Paper

An error analysis of the Wyko TOPO noncontact surface profiler
Author(s): Van A. Hodgkin
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Paper Abstract

An increasingly important tool in the characterization and measurement of optical materials and components in the Wyko TOPO Noncontact Surface Profiler. Optically, it consists of a low- to medium- power microscope in which the objective, depending upon the power, is a visible light interferometer of either Michelson, Mireau, or Linnik design. By integrating a detector array into the viewing system and attaching the reference arm of the interferometer to a piezoelectric transducer, the technique of surface profiling by phase shifting is accomplished by computer. The potential utility of this system to the investigator interested in the fundamental mechanisms of laser-induced damage is enormous, provided that the user is aware of its proper use and limitations. This paper is intended to act as a user's guide to the TOPO system in such cases and to document its precision and accuracy limitations given a variety of surface types and measurement configurations.

Paper Details

Date Published: 1 November 1990
PDF: 1 pages
Proc. SPIE 1438, Laser-Induced Damage in Optical Materials 1989, 14380O (1 November 1990); doi: 10.1117/12.2294433
Show Author Affiliations
Van A. Hodgkin, Naval Weapons Ctr. (United States)

Published in SPIE Proceedings Vol. 1438:
Laser-Induced Damage in Optical Materials 1989
Harold E. Bennett; Lloyd L. Chase; Arthur H. Guenther; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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