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Proceedings Paper

Nanoablation of Si surface with femtosecond-laser-induced plasmonic near-fields
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Paper Abstract

Superimposed multiple shots of low-fluence femtosecond (fs) laser pulses form a periodic nanostructure on various kinds of solid surfaces through ablation. It has been proposed that the periodicity of the nanostructures is attributed to the excitation of surface plasmon polaritons (SPPs). However, the excitation of SPPs on non-metallic material surfaces was never been directly observed. We have observed anomalies appearing in the reflection of intense fs laser pulses at a Si grating surface with a grating structure. The results have exhibited an abrupt decrease to create a sharp dip at a specific incident angle, where the Si grating surface was deeply ablated along the edge of the grooves periodically. The experimental results and model calculation provide directly evidence that SPPs can resonantly be excited at the interface between air and the non-metallic material surface and that enhanced near fields can form periodic structures on the surface.

Paper Details

Date Published: 19 February 2018
PDF: 8 pages
Proc. SPIE 10520, Laser-based Micro- and Nanoprocessing XII, 105200C (19 February 2018); doi: 10.1117/12.2293097
Show Author Affiliations
Godai Miyaji, Tokyo Univ. of Agriculture and Technology (Japan)
Masato Hagiya, Tokyo Univ. of Agriculture and Technology (Japan)

Published in SPIE Proceedings Vol. 10520:
Laser-based Micro- and Nanoprocessing XII
Udo Klotzbach; Kunihiko Washio; Rainer Kling, Editor(s)

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