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Proceedings Paper

Effect of plasma formation on the double pulse laser excitation of cubic silicon carbide
Author(s): Tomohito Otobe
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Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, ; doi: 10.1117/12.2292505
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Tomohito Otobe, National Institutes for Quantum and Radiological Science and Technology (Japan)


Published in SPIE Proceedings Vol. 10519:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII
Beat Neuenschwander; Costas P. Grigoropoulos; Tetsuya Makimura; Gediminas Račiukaitis, Editor(s)

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