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Proceedings Paper

Thin films structural properties: results of the full-atomistic supercomputer simulation
Author(s): F. V. Grigoriev; V. B. Sulimov; A. V. Tikhonravov
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Paper Abstract

The previously developed full-atomistic approach to the thin film growth simulation is applied for the investigation of the dependence of silicon dioxide films properties on deposition conditions. It is shown that the surface roughness and porosity are essentially reduced with the growth of energy of deposited silicon atoms. The growth of energy from 0.1 eV to 10 eV results in the increase of the film density for 0.2 - 0.4 g/cm3 and of the refractive index for 0.04-0.08. The compressive stress in films structures is observed for all deposition conditions. Absolute values of the stress tensor components increase with the growth of e energy of deposited atoms. The increase of the substrate temperature results in smoothing of the density profiles of the deposited films.

Paper Details

Date Published: 1 December 2017
PDF: 6 pages
Proc. SPIE 10603, Photonics, Devices, and Systems VII, 106030F (1 December 2017); doi: 10.1117/12.2292420
Show Author Affiliations
F. V. Grigoriev, M.V. Lomonosov Moscow State Univ. (Russian Federation)
V. B. Sulimov, M.V. Lomonosov Moscow State Univ. (Russian Federation)
A. V. Tikhonravov, M.V. Lomonosov Moscow State Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 10603:
Photonics, Devices, and Systems VII
Karel Fliegel; Petr Páta, Editor(s)

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