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Proceedings Paper

Ultra-compact plasmonic-oxide electro-optic modulator
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Paper Abstract

The ever-growing demands to compute information, store, and communicate generate a continuous driving force for transformative photonic technologies. On chip photonic integrated circuits (PICs) founded a roadmap for scaling down photonic modules to meet the challenges of bandwidth enhancement and power reduction. However, it also produces an even critical need for state-of-the-art devices and better materials. Lately, the material group of transparent conductive oxides (TCO) has appealed attentions for on-chip photonic components. In specific, indium tin oxide (ITO) has been found to have active large refractive index variations, which creates possibilities to realize high speed Electro-Optic (E-O) modulation of sub-diffraction device scales. This ITO based tapered plasmonic waveguide devices will combine the large E-O absorption effects of ITO with the localized SPPs and the ultra-strong optical field confinement. In this paper, we design the device which is fabricated on commercial silicon-on-insulator (SOI) platform integrated with a 3μm long, 300nm wide gold plasmonic slot waveguide, which can dynamically switch the optical transmission from high absorption mode by enhanced plasmonic E-O absorption to low loss mode. The active E-O modulation region consists of a metal-HfO2-ITO capacitor that can electrically switch the ITO into ENZ with ultra-high modulation strength of 2.62dB/μm in simulation and 3.5dB extinction ratio in experiment. We also demonstrated the EA modulator a relative uniform E-O modulation within 1530~1600nm wavelength.

Paper Details

Date Published: 22 February 2018
PDF: 5 pages
Proc. SPIE 10536, Smart Photonic and Optoelectronic Integrated Circuits XX, 105360S (22 February 2018); doi: 10.1117/12.2292288
Show Author Affiliations
Qian Gao, Oregon State Univ. (United States)
Erwen Li, Oregon State Univ. (United States)
Alan X. Wang, Oregon State Univ. (United States)

Published in SPIE Proceedings Vol. 10536:
Smart Photonic and Optoelectronic Integrated Circuits XX
Sailing He; El-Hang Lee, Editor(s)

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