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Proceedings Paper

Wave aberration tolerance for the optical design of a laser Fizeau interferometer
Author(s): Shiguang Wang
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Paper Abstract

This paper concerns a numerical technique for evaluating effect of wave aberration on the frequency response of a laser Fizeau interferometer. The frequency response is described by Coherent Phase Transfer Function, which is defined as the Fourier transform of the phase of the complex image of a phase object formed by the interferometer normalized to the Fourier transform of the phase object itself. Based on the results of the study an aberration tolerance criterion of 1/8-wave P-V is proposed for the optical design of a laser Fizeau interferometer.

Paper Details

Date Published: 27 November 2017
PDF: 8 pages
Proc. SPIE 10590, International Optical Design Conference 2017, 105900L (27 November 2017); doi: 10.1117/12.2291684
Show Author Affiliations
Shiguang Wang, Zygo Corp. (United States)


Published in SPIE Proceedings Vol. 10590:
International Optical Design Conference 2017
Peter P. Clark; Julius A. Muschaweck; Richard N. Pfisterer; John R. Rogers, Editor(s)

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