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Proceedings Paper

In situ observation of ultrashort pulse laser ablation process
Author(s): Stefan M. Remund; Antonia Neels; Thorsten Kramer; Josef Zürcher; Beat Jäggi; Beat Neuenschwander
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Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, ; doi: 10.1117/12.2291641
Show Author Affiliations
Stefan M. Remund, Berner Fachhochschule Technik und Informatik (Switzerland)
Antonia Neels, Empa – Swiss Federal Labs. for Materials Science and Technology (Switzerland)
Thorsten Kramer, Berner Fachhochschule Technik und Informatik (Switzerland)
Josef Zürcher, Berner Fachhochschule Technik und Informatik (Switzerland)
Beat Jäggi, Berner Fachhochschule Technik und Informatik (Switzerland)
Beat Neuenschwander, Berner Fachhochschule Technik und Informatik (Switzerland)


Published in SPIE Proceedings Vol. 10519:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII
Beat Neuenschwander; Costas P. Grigoropoulos; Tetsuya Makimura; Gediminas Račiukaitis, Editor(s)

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