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Proceedings Paper

Rapid prototyping of 2D glass microfluidic devices based on femtosecond laser assisted selective etching process
Author(s): Sung-Il Kim; Jeongtae Kim; Chiwan Koo; Yeun-Ho Joung; Jiyeon Choi
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Paper Abstract

Microfluidics technology which deals with small liquid samples and reagents within micro-scale channels has been widely applied in various aspects of biological, chemical, and life-scientific research. For fabricating microfluidic devices, a silicon-based polymer, PDMS (Polydimethylsiloxane), is widely used in soft lithography, but it has several drawbacks for microfluidic applications. Glass has many advantages over PDMS due to its excellent optical, chemical, and mechanical properties. However, difficulties in fabrication of glass microfluidic devices that requires multiple skilled steps such as MEMS technology taking several hours to days, impedes broad application of glass based devices. Here, we demonstrate a rapid and optical prototyping of a glass microfluidic device by using femtosecond laser assisted selective etching (LASE) and femtosecond laser welding. A microfluidic droplet generator was fabricated as a demonstration of a microfluidic device using our proposed prototyping. The fabrication time of a single glass chip containing few centimeter long and complex-shaped microfluidic channels was drastically reduced in an hour with the proposed laser based rapid and simple glass micromachining and hermetic packaging technique.

Paper Details

Date Published: 19 February 2018
PDF: 8 pages
Proc. SPIE 10522, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XVIII, 105221V (19 February 2018); doi: 10.1117/12.2291160
Show Author Affiliations
Sung-Il Kim, Korea Institute of Machinery & Materials (Korea, Republic of)
Hanbat National Univ. (Korea, Republic of)
Jeongtae Kim, Hanbat National Univ. (Korea, Republic of)
Chiwan Koo, Hanbat National Univ. (Korea, Republic of)
Yeun-Ho Joung, Hanbat National Univ. (Korea, Republic of)
Jiyeon Choi, Korea Institute of Machinery & Materials (Korea, Republic of)


Published in SPIE Proceedings Vol. 10522:
Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XVIII
Peter R. Herman; Michel Meunier; Roberto Osellame, Editor(s)

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