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Proceedings Paper

Monolithic CMOS-compatible zero-index metamaterials (Conference Presentation)
Author(s): Daryl I. Vulis; Yang Li; Orad Reshef; Philip Camayd-Munoz; Mei Yin; Shota Kita; Marko Loncar; Eric Mazur

Paper Abstract

Zero-index metamaterials exhibit exotic optical properties such as uniform spatial phase and infinite wavelength. These extreme properties can be utilized for integrated-optics applications. However, practical implementation of zero-index-based photonic devices requires compatibility with complementary metallic-oxide-semiconductor (CMOS) technologies. Zero-index metamaterials have been previously demonstrated in both out-of-plane and integrated configurations by taking advantage of a photonic Dirac-cone dispersion at the center of the Brillouin zone. Such metamaterials feature a square matrix of high aspect-ratio pillars and offer matched impedance through simultaneously zero effective permittivity and permeability. However, these configurations are inherently incompatible with integrated devices due to out-of-plane excitation, metallic inclusions, or high aspect-ratio structures. This work demonstrates a CMOS-compatible zero-index metamaterial consisting of a square array of air-holes in a 220-nm-thick silicon-on-insulator wafer. To experimentally verify the refractive index, we measure the angle of refraction of light through a triangular prism consisting of the metamaterial. The index is extracted using Snell's Law to verify a refractive index of zero at a wavelength of 1625 nm. Through the air-hole in silicon configuration, the proportion of silicon is increased as compared to designs based on high aspect-ratio silicon pillars. This enables a platform with low-aspect-ratio features, improved confinement of transverse electric polarized light, as well as the original benefit of matched impedance. Featuring a trivial monolithic fabrication and capacity for integration with the expansive library of existing silicon photonic devices, this metamaterial enables implementation of proposed zero-index devices and offers a powerful platform for exploring the future applications of zero-index materials.

Paper Details

Date Published: 14 March 2018
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Proc. SPIE 10541, Photonic and Phononic Properties of Engineered Nanostructures VIII, 105410X (14 March 2018); doi: 10.1117/12.2290844
Show Author Affiliations
Daryl I. Vulis, Harvard School of Engineering and Applied Sciences (United States)
Yang Li, John A. Paulson School of Engineering and Applied Sciences (United States)
Orad Reshef, Univ. of Ottawa (Canada)
Philip Camayd-Munoz, John A. Paulson School of Engineering and Applied Sciences (United States)
Mei Yin, John A. Paulson School of Engineering and Applied Sciences (United States)
Shota Kita, NTT Basic Research Labs. (Japan)
Marko Loncar, John A. Paulson School of Engineering and Applied Sciences (United States)
Eric Mazur, John A. Paulson School of Engineering and Applied Sciences (United States)


Published in SPIE Proceedings Vol. 10541:
Photonic and Phononic Properties of Engineered Nanostructures VIII
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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