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Digital mirror array for harsh environment
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Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, ; doi: 10.1117/12.2290695
Show Author Affiliations
Sebastien Lani, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Yves Pétremand, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Frédéric Zamkotsian, Lab. d'Astrophysique de Marseille (France)


Published in SPIE Proceedings Vol. 10545:
MOEMS and Miniaturized Systems XVII
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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