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Coupled multiphysics circuital modelling of micro-opto-mechanical pressure sensor systems
Author(s): Benedetto Troia; Chih-Hsien Huang; Shengping Mao; Hang Gao; Bruno Figeys; Roelof Jansen; Veronique Rochus; Xavier Rottenberg
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Paper Abstract

Micro-opto-mechanical pressure sensors (MOMPS) based on integrated optical Mach-Zehnder interferometers (MZI) have been fabricated at IMEC, exhibiting much improved sensitivity and noise performance compared to their piezoelectric and capacitive counterparts. However, the design of next generation MOMPS systems on chip still remains uncertain due to the intrinsic multiphysics nature covering mechanical, optical and electrical phenomena. For this reason, we present a sophisticated, flexible and customizable algorithmic tool for the multiphysics simulation and design of highperformance MOMPS systems on chip, including mechanical and optical effects as well as the electronic circuitry for the readout. Furthermore, static and dynamic operating regimes are analyzed, also comparing analytical solutions with experimental results and demonstrating a good agreement. Finally, system noise contributions generated by the optoelectronic components and readout electronics are calculated and a static sensitivity of 8 mV/Pa is measured in the fabricated sensors.

Paper Details

Date Published: 22 February 2018
PDF: 10 pages
Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 1054518 (22 February 2018); doi: 10.1117/12.2290361
Show Author Affiliations
Benedetto Troia, IMEC (Belgium)
Chih-Hsien Huang, IMEC (Belgium)
Shengping Mao, IMEC (Belgium)
Hang Gao, IMEC (Belgium)
Bruno Figeys, IMEC (Belgium)
Roelof Jansen, IMEC (Belgium)
Veronique Rochus, IMEC (Belgium)
Xavier Rottenberg, IMEC (Belgium)

Published in SPIE Proceedings Vol. 10545:
MOEMS and Miniaturized Systems XVII
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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