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Proceedings Paper

Waveguide integration silicon MSM photodetector in silicon nitride-on-SOI platform for visible and NIR wavelength band
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Paper Abstract

We propose and demonstrate a Silicon MSM photodetector integrated on Silicon Nitride-on-SOI platform. The demonstration shows the feasibility of an integrated photonic circuit platform in the visible to NIR wavelength with an integrated Silicon photodetector. We present a planarization free oxidation based Silicon Nitride waveguide fabrication on SOI. DC measurements on photo-detectors with the top illumination of 850 nm light observe the best responsivity of 0.1 A/W at 20 V with a dark current of 570 nA.

Paper Details

Date Published: 22 February 2018
PDF: 6 pages
Proc. SPIE 10528, Optical Components and Materials XV, 105280X (22 February 2018); doi: 10.1117/12.2290306
Show Author Affiliations
Avijit Chatterjee, Indian Institute of Science (India)
Shankar Kumar Selvaraja, Indian Institute of Science (India)


Published in SPIE Proceedings Vol. 10528:
Optical Components and Materials XV
Shibin Jiang; Michel J. F. Digonnet, Editor(s)

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