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Proceedings Paper

Application of tunable Fabry-Pérot interferometers with two movable reflectors in miniaturized spectral imaging systems
Author(s): Marco Meinig; Julia Wecker; Steffen Kurth; Mario Seifert; Karla Hiller; Martin Ebermann; Norbert Neumann
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Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, ; doi: 10.1117/12.2290301
Show Author Affiliations
Marco Meinig, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)
Julia Wecker, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)
Steffen Kurth, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)
Mario Seifert, Technische Univ. Chemnitz (Germany)
Karla Hiller, Technische Univ. Chemnitz (Germany)
Martin Ebermann, InfraTec GmbH (Germany)
Norbert Neumann, InfraTec GmbH (Germany)


Published in SPIE Proceedings Vol. 10545:
MOEMS and Miniaturized Systems XVII
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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