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Proceedings Paper

Direct writing of three-dimensional Cu-based sensors using femtosecond laser reduction of CuO nanoparticles
Author(s): Mizue Mizoshiri; Seiichi Hata
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Paper Abstract

2D and 3D metal microstructures are directly written using femtosecond laser reductive sintering of metal oxide nanoparticles. CuO nanoparticle solutions including CuO nanoparticles, a reductant agent, and a dispersant, were coated on glass substrates. Then, focused femtosecond laser pulses were irradiated onto the solution film to write the microstructures in air. Finally, non-irradiated CuO nanoparticles were removed. Cu-rich and Cu2O-rich microstructures were selectively fabricated by controlling the laser irradiation conditions. We demonstrated direct-writing of 2D and 3D Cu-based microstructures using femtosecond laser-induced reduction of CuO NPs. Using respective appropriate femtosecond laser conditions, 3D Cu-rich microstructures were obtained by a combined process of the dispensing coating and laser irradiation. The Cu-rich hot-film flow sensor which had microbridge structure, were successfully produced. This direct-writing technique is useful for fabricating various sensors on arbitral shaped substrates in air.

Paper Details

Date Published: 19 February 2018
PDF: 7 pages
Proc. SPIE 10520, Laser-based Micro- and Nanoprocessing XII, 1052013 (19 February 2018); doi: 10.1117/12.2290166
Show Author Affiliations
Mizue Mizoshiri, Nagoya Univ. (Japan)
Seiichi Hata, Nagoya Univ. (Japan)


Published in SPIE Proceedings Vol. 10520:
Laser-based Micro- and Nanoprocessing XII
Udo Klotzbach; Kunihiko Washio; Rainer Kling, Editor(s)

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