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Proceedings Paper

Electrical micro-heating structures on glass created by laser ablation
Author(s): M. Neitz; G. Böttger; M. Queisser; N. Arndt-Staufenbiel; M. Schneider-Ramelow
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Paper Abstract

Addressing the need for fast design cycles and tooling in the assembly of small structures, a flexible approach to overcome the obstacles of current time-consuming manufacturing methods is needed. Additionally, assembly of small and especially optical structures is often limited concerning the application and curing of adhesives used for joining. Local heating structures can be seen as an ideal way of solving this issue. This paper shows the simulation and flexible laser structuring of miniaturized heating. Mask-based large panel physical vapor deposition (PVD) processes and subsequent laser processing appear to be economical and flexible, and are compared to standard panel level lithography processes.

Paper Details

Date Published: 16 February 2018
PDF: 7 pages
Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 105190G (16 February 2018); doi: 10.1117/12.2290049
Show Author Affiliations
M. Neitz, Technische Univ. Berlin (Germany)
G. Böttger, Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration (Germany)
M. Queisser, Technische Univ. Berlin (Germany)
N. Arndt-Staufenbiel, Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration (Germany)
M. Schneider-Ramelow, Technische Univ. Berlin (Germany)


Published in SPIE Proceedings Vol. 10519:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII
Beat Neuenschwander; Costas P. Grigoropoulos; Tetsuya Makimura; Gediminas Račiukaitis, Editor(s)

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