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Proceedings Paper

A novel polishing stop for accurate integration of potassium yttrium double tungstate on a silicon dioxide
Author(s): Carlijn I. van Emmerik; Simen M. Martinussen; Jinfeng Mu; Meindert Dijkstra; Roy Kooijman; Sonia M. García-Blanco
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Paper Abstract

Rare-earth ion doped potassium yttrium double tungstate, RE:KY(WO4)2, is a promising candidate for the realization of on-chip lasers and amplifiers. Two major bottlenecks difficult the realization of compact, high-contrast devices. Firstly, the crystal can only be grown on a lattice matched substrate, leading to a low (<2×10-2) refractive index contrast between core and cladding. Secondly, the required thickness for the high-index contrast waveguides, ~1 μm, makes a lapping and polishing approach very challenging. In this work we propose a novel polishing stop that will permit to accurately control the final thickness of the KY(WO4)2 waveguide within a few tens of nanometers. A 1 mm thick KY(WO4)2 substrate is flip-chip bonded with an adhesive layer onto a SiO2 substrate. Afterwards a low temperature pulsed laser deposited (PLD) Al2O3 layer - with the desired final thickness of the KY(WO4)2 waveguide core - is deposited on top of the assembly. The sample is then thinned using a multistep lapping and polishing procedure. Earlier work with a polishing stop made from SiO2, showed a decrease of the polishing speed with a factor 3-4, allowing the termination of the process within a tolerance of a few tens of nanometers.

Paper Details

Date Published: 23 February 2018
PDF: 7 pages
Proc. SPIE 10535, Integrated Optics: Devices, Materials, and Technologies XXII, 105350U (23 February 2018); doi: 10.1117/12.2289955
Show Author Affiliations
Carlijn I. van Emmerik, Univ. Twente (Netherlands)
Simen M. Martinussen, Univ. Twente (Netherlands)
Jinfeng Mu, Univ. Twente (Netherlands)
Meindert Dijkstra, Univ. Twente (Netherlands)
Roy Kooijman, Univ. Twente (Netherlands)
Sonia M. García-Blanco, Univ. Twente (Netherlands)

Published in SPIE Proceedings Vol. 10535:
Integrated Optics: Devices, Materials, and Technologies XXII
Sonia M. García-Blanco; Pavel Cheben, Editor(s)

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