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Proceedings Paper

Two-photon laser lithography in metrology
Author(s): Julian Hering; Matthias Eifler; Jörg Seewig; Georg von Freymann
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Proc. SPIE 10544, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI, ; doi: 10.1117/12.2289900
Show Author Affiliations
Julian Hering, Technische Univ. Kaiserslautern (Germany)
Matthias Eifler, Technische Univ. Kaiserslautern (Germany)
Jörg Seewig, Technische Univ. Kaiserslautern (Germany)
Georg von Freymann, Technische Univ. Kaiserslautern (Germany)
Fraunhofer-Institut für Techno-und Wirtschaftsmathematik (Germany)


Published in SPIE Proceedings Vol. 10544:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

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