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Proceedings Paper

High repetition frequency micro hole drilling using ultrashort pulse laser radiation
Author(s): Andreas Gruner; Joerg Schille; Udo Loeschner
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Proc. SPIE 10520, Laser-based Micro- and Nanoprocessing XII, ; doi: 10.1117/12.2289853
Show Author Affiliations
Andreas Gruner, Hochschule Mittweida (Germany)
Joerg Schille, Hochschule Mittweida (Germany)
Udo Loeschner, Hochschule Mittweida (Germany)


Published in SPIE Proceedings Vol. 10520:
Laser-based Micro- and Nanoprocessing XII
Udo Klotzbach; Kunihiko Washio; Rainer Kling, Editor(s)

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