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Proceedings Paper

Silicon photonics based on-chip vibrometer
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Paper Abstract

In this paper, we demonstrate a compact silicon photonics based vibrometer using an on-chip photonic grating (OPG) based sensor. OPG works on the principle of interference where the motion of the cantilever is captured at the output as an intensity variation. The advantage of OPG based sensor over conventional Laser Doppler vibrometer is increased tolerance to alignment errors as both the grating and the cantilever can be integrated on a single chip. The grating parameters were optimized using 2D-FDTD to achieved maximum sensitivity to the displacement of a cantilever. OPG with on-chip germanium photodetector is studied, which indicates a sensitivity of 54 μW/nm. We experimentally demonstrate the feasibility of the proposed sensor that can achieve a displacement sensitivity of 5.3 μW/nm.

Paper Details

Date Published: 22 February 2018
PDF: 6 pages
Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450M (22 February 2018); doi: 10.1117/12.2289772
Show Author Affiliations
Viphretuo Mere, Indian Institute of Science (India)
Rakshitha Kallega, Indian Institute of Science (India)
Akshay Naik, Indian Institute of Science (India)
Rudra Pratap, Indian Institute of Science (India)
Shankar Kumar Selvaraja, Indian Institute of Science (India)


Published in SPIE Proceedings Vol. 10545:
MOEMS and Miniaturized Systems XVII
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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