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MEMS FTIR spectrometer with enhanced resolution for low cost gas sensing in the NIR
Author(s): Islam Samir; Yasser M. Sabry; Mazen Erfan; Niveen Badra; Diaa Khalil
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Paper Abstract

In this work, we report the detection of C2H2 and CO2 in the NIR range using a MEMS Fourier Transform Infrared (FTIR) spectrometer. For this purpose, a super resolution autoregressive (AR) algorithm is used. The spectrometer is working in the wavelength range 1300–2500 nm while its core engine is a scanning Michelson interferometer micromachined using deep reactive ion etching (DRIE) technology on SOI wafer. The interferometer scanning mirror is driven by a MEMS electrostatic actuator with travel range corresponding to a resolution of about 30 cm-1.The spectrometer with the algorithm are used for measuring a standard optical filter with line width of 1 nm and measured line width is 1.7 nm that corresponds to 7.5 cm-1. The spectrum of a mixture of C2H2 and CO2 is measured using the MEMS spectrometer and a gas cell with 10cm light-gas interaction length. The AR model is applied on the interferogram. The resulting spectrum after the AR application shows an enhanced resolution of 15cm-1 that led to better identification of the absorption peaks.

Paper Details

Date Published: 22 February 2018
PDF: 8 pages
Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450E (22 February 2018); doi: 10.1117/12.2288996
Show Author Affiliations
Islam Samir, Ain Shams Univ. (Egypt)
Yasser M. Sabry, Ain Shams Univ. (Egypt)
Si-Ware Systems (Egypt)
Mazen Erfan, Ain Shams Univ. (Egypt)
Niveen Badra, Ain Shams Univ. (Egypt)
Diaa Khalil, Ain Shams Univ. (Egypt)
Si-Ware Systems (Egypt)


Published in SPIE Proceedings Vol. 10545:
MOEMS and Miniaturized Systems XVII
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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