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Proceedings Paper

Investigation on gas medium parameters for an ArF excimer laser through orthogonal experimental design
Author(s): Xingliang Song; Pengfei Sha; Yuanyuan Fan; Yi Zhou; Jiangshan Zhao
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Proc. SPIE 10511, Solid State Lasers XXVII: Technology and Devices, ; doi: 10.1117/12.2288946
Show Author Affiliations
Xingliang Song, Academy of Opto-Electronics, CAS (China)
Pengfei Sha, Academy of Opto-Electronics, CAS (China)
Yuanyuan Fan, Academy of Opto-Electronics, CAS (China)
Yi Zhou, Academy of Opto-Electronics, CAS (China)
Jiangshan Zhao, Academy of Opto-Electronics, CAS (China)


Published in SPIE Proceedings Vol. 10511:
Solid State Lasers XXVII: Technology and Devices
W. Andrew Clarkson; Ramesh K. Shori, Editor(s)

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