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Proceedings Paper

Performance comparison of piezoelectric accelerometer and laser interferometer in vibration monitoring and measurements
Author(s): Hong Wei; Kenneth J. Stout
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Paper Abstract

In this paper, vibration monitoring and measurement carried out in the newly developed nanometer metrology laboratory in Birmingham University, is described with respect to measurement methods and instrument performance. Two types of instrument -- piezoelectric accelerometer (B&K type 8318 with a type 2140 bus-controlled frequency analyzer) and laser interferometer (Renishaw ML10 laser interferometer with the Keithley multi-channel FFT analyzer) were used in vibration measurement on capability verification of a vibration isolation system. Vibration results from a concrete block are presented. From the point of view of the measured vibration results, it is demonstrated that the performance of the above two instruments is not completely the same in the different frequency ranges. The related comparison and discussions are presented in this paper.

Paper Details

Date Published: 22 December 1995
PDF: 9 pages
Proc. SPIE 2595, Machine Tool, In-Line, and Robot Sensors and Controls, (22 December 1995); doi: 10.1117/12.228856
Show Author Affiliations
Hong Wei, Univ. of Birmingham (United Kingdom)
Kenneth J. Stout, Univ. of Birmingham (United Kingdom)


Published in SPIE Proceedings Vol. 2595:
Machine Tool, In-Line, and Robot Sensors and Controls
George D. Foret; Kam C. Lau; Bartholomew O. Nnaji, Editor(s)

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