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Proceedings Paper

Fabrication techniques for high-resolution lens assemblies
Author(s): Anees Ahmad
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Paper Abstract

This paper presents the fabrication and assembly techniques for high resolution lens assemblies such as the projection lenses used for submicron photolithography. In order to meet the stringent precision and dimensional stability requirements for such lens assemblies the aluminum lens cells are machined and heat treated in several steps to achieve the required accuracies. Special optical tools and mechanical gages are then used to assemble the lenses into the cells on an airbearing table. 1.

Paper Details

Date Published: 1 November 1990
PDF: 5 pages
Proc. SPIE 1335, Dimensional Stability, (1 November 1990); doi: 10.1117/12.22883
Show Author Affiliations
Anees Ahmad, Ctr. for Applied Optics/Univ. of Alabama in Huntsville (United States)

Published in SPIE Proceedings Vol. 1335:
Dimensional Stability
Roger A. Paquin, Editor(s)

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