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Proceedings Paper

Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer
Author(s): Yangjin Kim; Naohiko Sugita; Mamoru Mitsuishi
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Paper Abstract

In this study, a 6N – 5 phase shifting algorithm comprising a polynomial window function and discrete Fourier transform is developed for the simultaneous measurement of the surface shape and optical thickness of a transparent plate. The characteristics of the 6N – 5 algorithm were estimated by connection with the Fourier representation. The phase error of the measurements performed using the 6N – 5 algorithm is discussed and compared with those of measurements obtained using other algorithms. Finally, the surface shape and optical thickness of a transparent plate were measured simultaneously using the 6N – 5 algorithm and a wavelength tuning interferometer.

Paper Details

Date Published: 16 February 2018
PDF: 6 pages
Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 105191D (16 February 2018); doi: 10.1117/12.2287641
Show Author Affiliations
Yangjin Kim, Pusan National Univ. (Korea, Republic of)
Naohiko Sugita, The Univ. of Tokyo (Japan)
Mamoru Mitsuishi, The Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 10519:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII
Beat Neuenschwander; Costas P. Grigoropoulos; Tetsuya Makimura; Gediminas Račiukaitis, Editor(s)

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