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Structure design of AlN double-ended tuning fork resonators
Author(s): Qiang Lei; Yang Gao; Chao Han
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Paper Abstract

The resonant sensors based on aluminum nitride double-ended tuning fork (AlN DETF) have the characteristics of small size, good stability and reliability, fast response. In order to improve the sensitivity and resolution, it is necessary to analyze the influence of the structure parameters of vibrating beam on the sensitivity and signal power of AlN resonator. The multi-physics model of AlN DETF resonator was established to verify effect of single parameter on the sensitivity by pre-stressed eigenfrequency analysis. The relationships between signal power and length, width of vibrating beam were obtained by post-processing data of simulation results when the thickness remained constant. The results show that relative sensitivity and signal power are growing with opposite direction with the width or the length of the beam. Therefore, there is a design tradeoff between signal power and relative sensitivity of AlN resonator according to the process and structure strength. The optimized AlN DETF resonator was simulated, its sensitivity, signal power and Q are 56 Hz/μN, 6.8e-4 nW and 958, respectively.

Paper Details

Date Published: 15 November 2017
PDF: 7 pages
Proc. SPIE 10605, LIDAR Imaging Detection and Target Recognition 2017, 1060518 (15 November 2017); doi: 10.1117/12.2287156
Show Author Affiliations
Qiang Lei, Southwest Univ. of Science and Technology (China)
Yang Gao, China Academy of Engineering Physics (China)
Institute of High Energy Physics (China)
Chao Han, Southwest Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 10605:
LIDAR Imaging Detection and Target Recognition 2017
Yueguang Lv; Weimin Bao; Weibiao Chen; Zelin Shi; Jianzhong Su; Jindong Fei; Wei Gong; Shensheng Han; Weiqi Jin; Jian Yang, Editor(s)

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