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Recent progress on the scalable fabrication of hybrid polymer/SiO2 nanophotonic cavity arrays with an encapsulated MoS2 film
Author(s): Sebastian Hammer; Hans-Moritz Mangold; Ariana E. Nguyen; Dominic Martinez-Ta; Sahar Naghibi Alvillar; Ludwig Bartels; Hubert J. Krenner
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Paper Abstract

We review1 the fully-scalable fabrication of a large array of hybrid molybdenum disulfide (MoS2) - silicon dioxide (SiO2) one-dimensional (1D), freestanding photonic-crystal cavities (PCCs) capable of enhancement of the MoS2 photoluminescence (PL) at the narrow cavity resonance. As demonstrated in our prior work [S. Hammer et al., Sci. Rep. 7, 7251 (2017)]1, geometric mode tuning over the wide spectral range of MoS2 PL can be achieved by changing the PC period. In this contribution, we provide a step-by-step description of the fabrication process and give additional detailed information on the degradation of MoS2 by XeF2 vapor. We avoid potential damage of the MoS2 monolayer during the crucial XeF2 etch by refraining from stripping the electron beam (e-beam) resist after dry etching of the photonic crystal pattern. The remaining resist on top of the samples encapsulates and protects the MoS2 film during the entire fabrication process. Albeit the thickness of the remaining resists strongly depends on the fabrication process, the resulting encapsulation of the MoS2 layer improves the confinement to the optical modes and gives rise to a potential enhancement of the light-matter interaction.

Paper Details

Date Published: 23 February 2018
PDF: 10 pages
Proc. SPIE 10534, 2D Photonic Materials and Devices, 105340E (23 February 2018); doi: 10.1117/12.2287126
Show Author Affiliations
Sebastian Hammer, Univ. Augsburg (Germany)
Nanosystems Initiative Munich (Germany)
Hans-Moritz Mangold, Univ. Augsburg (Germany)
Nanosystems Initiative Munich (Germany)
Ariana E. Nguyen, Univ. of California, Riverside (United States)
Dominic Martinez-Ta, Univ. of California, Riverside (United States)
Sahar Naghibi Alvillar, Univ. of California, Riverside (United States)
Ludwig Bartels, Univ. of California, Riverside (United States)
Hubert J. Krenner, Univ. Augsburg (Germany)
Nanosystems Initiative Munich (Germany)


Published in SPIE Proceedings Vol. 10534:
2D Photonic Materials and Devices
Arka Majumdar; Xiaodong Xu; Joshua R. Hendrickson, Editor(s)

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