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Femtosecond laser-assisted etching: making arbitrary shaped 3D glass micro-structures
Author(s): Linas Jonušauskas; Titas Tičkūnas; Andrius Narmontas; Gedvinas Nemickas; Vytautas Purlys; Giedrė Grigalevičiūtė; Roaldas Gadonas
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Paper Abstract

With fast development of interdisciplinary fields relying on various micro- and nano-structures (for instance, microfluidics, micromechanics or biomedicine) the pressure is on for the fabrication technologies to meet the ever increasing demands for the manufacturing throughput and applicable materials. Glass is one of the key substances used through the ages for creation of various objects, yet till this day the possibilities to process it in micro-scale in 3D fashion is limited. Here, we provide examples of structures that can be created out of glass by applying fs laser assisted selective etching. These include molds for micromechanical part creation, high-quality microchannels and microneedle arrays. The possibilities, limitations and perspectives of this microfabrication technology are discussed, comparisons with additive manufacturing are provided.

Paper Details

Date Published: 19 February 2018
PDF: 8 pages
Proc. SPIE 10520, Laser-based Micro- and Nanoprocessing XII, 105201G (19 February 2018); doi: 10.1117/12.2286906
Show Author Affiliations
Linas Jonušauskas, Femtika Ltd. (Lithuania)
Vilnius Univ. (Lithuania)
Titas Tičkūnas, Femtika Ltd. (Lithuania)
Vilnius Univ. (Lithuania)
Andrius Narmontas, Femtika Ltd. (Lithuania)
Gedvinas Nemickas, Femtika Ltd. (Lithuania)
Vytautas Purlys, Femtika Ltd. (Lithuania)
Vilnius Univ. (Lithuania)
Giedrė Grigalevičiūtė, Femtika Ltd. (Lithuania)
Roaldas Gadonas, Vilnius Univ. (Lithuania)
Femtika Ltd. (Lithuania)

Published in SPIE Proceedings Vol. 10520:
Laser-based Micro- and Nanoprocessing XII
Udo Klotzbach; Kunihiko Washio; Rainer Kling, Editor(s)

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