Share Email Print

Proceedings Paper

Stress metrology for flat-panel displays G6 and bigger
Author(s): Wojtek J. Walecki
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We the tool for measurement of the stress in Generation 6 Flat Panel Displays (G6 FPD) and larger by observing the distortion of image of the light emitting device pattern reflected in the substrate. The observed topography is used to calculate stress in film. The metrology does not involve any moving parts. Tool has repeatability and accuracy of the order of 5 MPa for the glass and film thickness of 0.7 mm, and 5 μm respectively. The measurement time is smaller than 100 s. Tool does is fully compatible with standard robot based glass handling technology.

Paper Details

Date Published: 19 February 2018
PDF: 16 pages
Proc. SPIE 10556, Advances in Display Technologies VIII, 105560E (19 February 2018); doi: 10.1117/12.2286781
Show Author Affiliations
Wojtek J. Walecki, Frontier Semiconductor, Inc. (United States)

Published in SPIE Proceedings Vol. 10556:
Advances in Display Technologies VIII
Liang-Chy Chien; Tae-Hoon Yoon; Qiong-Hua Wang, Editor(s)

© SPIE. Terms of Use
Back to Top