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Proceedings Paper

Prediction and validation of the polarization performance of high-numerical aperture inspection lenses
Author(s): Stephan Fahr; Jan Werschnik; Matthias Bening; Tim Baldsiefen
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Paper Abstract

In this work, we show how to predict the polarization-performance of high-numerical aperture optical systems. Various important influences, such as coating-induced phase change, stress induced birefringence, or the quality of the raw material are investigated.

Paper Details

Date Published: 27 November 2017
PDF: 7 pages
Proc. SPIE 10590, International Optical Design Conference 2017, 1059006 (27 November 2017); doi: 10.1117/12.2286587
Show Author Affiliations
Stephan Fahr, JENOPTIK Optical Systems GmbH (Germany)
Jan Werschnik, JENOPTIK Optical Systems GmbH (Germany)
Matthias Bening, JENOPTIK Optical Systems GmbH (Germany)
Tim Baldsiefen, JENOPTIK Optical Systems GmbH (Germany)

Published in SPIE Proceedings Vol. 10590:
International Optical Design Conference 2017
Peter P. Clark; Julius A. Muschaweck; Richard N. Pfisterer; John R. Rogers, Editor(s)

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