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Proceedings Paper

Miniature tilting mechanism using piezoelectric actuators
Author(s): Satoshi Tawara; Takayuki Goto; Kimiyuki Mitsui
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Paper Abstract

A tilting mechanism using piezoelectric actuators which has two rotation degrees of freedom has been developed. The dimensions of the body of the tilting mechanism are 10 mm in diameter and 24 mm in length. We have achieved the following specifications of the tilting mechanism; +/- 20 degree(s) rotational angle in the orthogonal two axes, 30 seconds of the angular resolution, 10 degree(s)/sec of the maximum rotation speed, and 1.75 Nmm of the maximum torque. This paper describes the structure and the experimental results of the linear actuator and the tilting mechanism.

Paper Details

Date Published: 18 December 1995
PDF: 8 pages
Proc. SPIE 2593, Microrobotics and Micromechanical Systems, (18 December 1995); doi: 10.1117/12.228650
Show Author Affiliations
Satoshi Tawara, Mitsubishi Heavy Industries, Ltd. (Japan)
Takayuki Goto, Mitsubishi Heavy Industries, Ltd. (Japan)
Kimiyuki Mitsui, Keio Univ. (Japan)


Published in SPIE Proceedings Vol. 2593:
Microrobotics and Micromechanical Systems
Lynne E. Parker, Editor(s)

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