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Proceedings Paper

Micropower supply for electrostatic micromotors
Author(s): William N. Carr; Hong Jiang
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Paper Abstract

This paper presents a high-voltage generator circuit as power supply for an electrostatic micromotor with process integration based on a standard 2 micrometers CMOS technology. This voltage multiplier circuit utilizes n-type with in a standard 2 micrometers CMOS process as a vital innovation to achieve electrically isolated and floated diodes. This design secures a high- voltage output limited only by the breakdown voltage of n-well to p-substrate pn junctions. For the purpose we used, the power supply can provide approximately 50 V dc output by inputting 5 V dc power and two non-overlapping 0/5 V clock signals. The demonstrated design has application in microbiotic and microactuated systems.

Paper Details

Date Published: 18 December 1995
PDF: 9 pages
Proc. SPIE 2593, Microrobotics and Micromechanical Systems, (18 December 1995); doi: 10.1117/12.228648
Show Author Affiliations
William N. Carr, New Jersey Institute of Technology (United States)
Hong Jiang, New Jersey Institute of Technology (United States)


Published in SPIE Proceedings Vol. 2593:
Microrobotics and Micromechanical Systems
Lynne E. Parker, Editor(s)

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