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Proceedings Paper

Parylene-C diaphragm-based fiber-optic Fabry-Perot acoustic sensor for trace gas detection
Author(s): Z. Gong; X. Zhou; K. Chen; X. Zhou; Q. Yu
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Paper Abstract

We demonstrate a high-sensitivity fiber-optic Fabry-Perot acoustic sensor based on a thin Parylene-C diaphragm. The vacuum thermal evaporation deposition method is used to fabricate the Parylene-C nanofilm, which possesses strong adhesion and good compactness. Based on these characteristics, the Parylene-C diaphragm is fabricated with 9 mm in diameter and 500 nm in thickness. The noise limited equivalent acoustic signal level is 33.5 μPa/Hz1/2 at the frequency of 30 Hz. The pressure sensitivities of the acoustic sensor are more than 1000 mV/Pa at the frequency from 10 Hz to 30 Hz. The fundamental resonance frequency of the Parylene-C diaphragm is about 13 Hz. The acoustic sensor is applied in a multiple trace gas detection system based on photoacoustic spectroscopy. The detection limits of acetylene (C2H2), carbon monoxide (CO) and carbon dioxide (CO2) are achieved to be 0.25, 0.32 and 1.1 parts-per-million, respectively.

Paper Details

Date Published: 10 January 2018
PDF: 6 pages
Proc. SPIE 10618, 2017 International Conference on Optical Instruments and Technology: Advanced Optical Sensors and Applications, 106180O (10 January 2018); doi: 10.1117/12.2286076
Show Author Affiliations
Z. Gong, Dalian Univ. of Technology (China)
X. Zhou, Dalian Univ. of Technology (China)
K. Chen, Dalian Univ. of Technology (China)
X. Zhou, Dalian Univ. of Technology (China)
Q. Yu, Dalian Univ. of Technology (China)


Published in SPIE Proceedings Vol. 10618:
2017 International Conference on Optical Instruments and Technology: Advanced Optical Sensors and Applications
Xuping Zhang; Hai Xiao; Francisco Javier Arregui; Liquan Dong, Editor(s)

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