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Proceedings Paper

Modeling and simulation of corner-cube reflector: effect on coaxiality detection accuracy
Author(s): Ge Song; Junfeng Han; Ping Ruan; Yue Wang; Furui Zhang
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Paper Abstract

When the four-quadrant detector is detected using the pyramidal prism to reflect the light, the dihedral angle error causes the spot offset. In this paper, the relationship between the reflection spot offset and the three dihedral angle errors is analyzed by combining the pyramid model with the detector detection principle, and the influence of the dihedral angle error on the center shift of the reflected light spot is explored qualitatively and quantitatively. The simulation results show a high degree of central symmetry, which can be used to eliminate the system error resulting from the dihedral angle error of the corner prism, in order to minimize detection accuracy to 0.1μm. In addition, The simulation results provide a theoretical basis for the subsequent coaxial accuracy test.

Paper Details

Date Published: 24 October 2017
PDF: 9 pages
Proc. SPIE 10462, AOPC 2017: Optical Sensing and Imaging Technology and Applications, 1046248 (24 October 2017); doi: 10.1117/12.2285499
Show Author Affiliations
Ge Song, Xi'an Institute of Optics and Precision Mechanics (China)
Junfeng Han, Xi'an Institute of Optics and Precision Mechanics (China)
Ping Ruan, Xi'an Institute of Optics and Precision Mechanics (China)
Yue Wang, Xi'an Institute of Optics and Precision Mechanics (China)
Furui Zhang, Xi'an Institute of Optics and Precision Mechanics (China)


Published in SPIE Proceedings Vol. 10462:
AOPC 2017: Optical Sensing and Imaging Technology and Applications
Yadong Jiang; Haimei Gong; Weibiao Chen; Jin Li, Editor(s)

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