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A new linear structured light module based on the MEMS micromirror
Author(s): Peng Zhou; Wenjiang Shen; Huijun Yu
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Paper Abstract

A new linear structured light module based on the Micro-Electro-Mechanical System (MEMS) two-dimensional scanning micromirror was designed and created. This module consists of a laser diode, a convex lens, and the MEMS micromirror. The laser diode generates the light and the convex lens control the laser beam to converge on a single point with large depth of focus. The fast scan in horizontal direction of the micromirror will turn the laser spot into a homogenous laser line. Meanwhile, the slow scan in vertical direction of the micromirror will move the laser line in the vertical direction. The width of the line generated by this module is 300μm and the length is 120mm and the moving distance is 100mm at 30cm away from the module. It will promote the development of industrial detection.

Paper Details

Date Published: 24 October 2017
PDF: 7 pages
Proc. SPIE 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing, 104581H (24 October 2017); doi: 10.1117/12.2285455
Show Author Affiliations
Peng Zhou, Suzhou Institute of Nano-Tech and Nano-Bionics (China)
Wenjiang Shen, Suzhou Institute of Nano-Tech and Nano-Bionics (China)
Huijun Yu, Suzhou Institute of Nano-Tech and Nano-Bionics (China)


Published in SPIE Proceedings Vol. 10458:
AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing
Wolfgang Osten; Anand Krishna Asundi; Huijie Zhao, Editor(s)

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