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Proceedings Paper

Research and design on orthogonal diffraction grating-based 3D nanometer displacement sensor
Author(s): Baoshuai Liu; Yibao Yuan; Zhehao Yin
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Paper Abstract

This study concerns an orthogonal diffraction grating-based nanometer displacement sensor. In this study, we performed calculation of displacements in the XYZ directions. In the optical measured path part, we used a two-dimensional orthogonal motion grating and a two-dimensional orthogonal reference grating with the pitch of 0.5um to measure the displacement of XYZ in three directions by detecting ±1st diffraction fringes. The self-collimated structure of the grating greatly extended the Z-axis range. We also simulated the optical path of the sensor with ZEMAX software and verified the feasibility of the scheme. For signal subdivision and processing, we combined large number counting (completed grating line) with small number counting (digital subdivision), realizing high multiples of subdivision of grating interference signals. We used PC to process the interference fringes and greatly improved the processing speed. In the scheme, the theoretical multiples of subdivision could reach 1024 with 10-bit AD conversion, but the actual multiples of subdivision was limited by the quality of the grating interference signals. So we introduced an orthogonal compensation circuit and a filter circuit to improve the signal quality.

Paper Details

Date Published:
PDF: 12 pages
Proc. SPIE 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing, 1045818; doi: 10.1117/12.2285042
Show Author Affiliations
Baoshuai Liu, Shanghai Jiaotong Univ. (China)
Yibao Yuan, Shanghai Jiaotong Univ. (China)
Zhehao Yin, Shanghai Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 10458:
AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing
Wolfgang Osten; Anand Krishna Asundi; Huijie Zhao, Editor(s)

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