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Proceedings Paper

Microscopic 3D measurement of dynamic scene using optimized pulse-width-modulation binary fringe
Author(s): Yan Hu; Qian Chen; Shijie Feng; Tianyang Tao; Hui Li; Chao Zuo
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Paper Abstract

Microscopic 3-D shape measurement can supply accurate metrology of the delicacy and complexity of MEMS components of the final devices to ensure their proper performance. Fringe projection profilometry (FPP) has the advantages of noncontactness and high accuracy, making it widely used in 3-D measurement. Recently, tremendous advance of electronics development promotes 3-D measurements to be more accurate and faster. However, research about real-time microscopic 3-D measurement is still rarely reported. In this work, we effectively combine optimized binary structured pattern with number-theoretical phase unwrapping algorithm to realize real-time 3-D shape measurement. A slight defocusing of our proposed binary patterns can considerably alleviate the measurement error based on phase-shifting FPP, making the binary patterns have the comparable performance with ideal sinusoidal patterns. Real-time 3-D measurement about 120 frames per second (FPS) is achieved, and experimental result of a vibrating earphone is presented.

Paper Details

Date Published: 24 October 2017
PDF: 6 pages
Proc. SPIE 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing, 1045813 (24 October 2017); doi: 10.1117/12.2284456
Show Author Affiliations
Yan Hu, Nanjing Univ. of Science and Technology (China)
Qian Chen, Nanjing Univ. of Science and Technology (China)
Shijie Feng, Nanjing Univ. of Science and Technology (China)
Tianyang Tao, Nanjing Univ. of Science and Technology (China)
Hui Li, Nanjing Univ. of Science and Technology (China)
Chao Zuo, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 10458:
AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing
Wolfgang Osten; Anand Krishna Asundi; Huijie Zhao, Editor(s)

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