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Proceedings Paper

Future lithography technology
Author(s): Gene Fuller
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Paper Abstract

Introduction-Lithography is the key enabler for semiconductor manufacturing. Future progress in circuit scaling depends on continued progress in lithography capability scaling. Lithography is once again approaching a "barrier" where existing technology does not demonstrate a clear path for continued progress. We will explore some continuities and discontinuities in lithography that promise to drive the scaling process for many years

Paper Details

Date Published: 30 August 2017
PDF: 66 pages
Proc. SPIE 10321, Single Frequency Semiconductor Lasers, 1032105 (30 August 2017); doi: 10.1117/12.2284084
Show Author Affiliations
Gene Fuller, Texas Instruments (United States)

Published in SPIE Proceedings Vol. 10321:
Single Frequency Semiconductor Lasers
Jens Buus, Editor(s)

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