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Proceedings Paper

Combining optical metrology with mechanical analysis
Author(s): Victor Genberg
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Paper Abstract

Mechanical analysis can be useful in support of optical tests. Comparison of test and analysis improves the understanding and confidence in both. Tools are available to convert finite element (FE) results into a format compatible with interferogram test arrays for easy correlation.

Paper Details

Date Published: 19 May 2003
PDF: 3 pages
Proc. SPIE 10314, Optifab 2003: Technical Digest, 1031412 (19 May 2003); doi: 10.1117/12.2284027
Show Author Affiliations
Victor Genberg, Sigmadyne, Inc. (United States)

Published in SPIE Proceedings Vol. 10314:
Optifab 2003: Technical Digest
Walter C. Czajkowski; Toshihide Dohi; Hans Lauth; Harvey M. Pollicove, Editor(s)

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