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Proceedings Paper

Development of nano-machining system and its application
Author(s): N. Kawasegi
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Paper Abstract

The 3D nano-machining and measuring system that can control with nanometer-scale accuracy have been developed in this research. In this system, the functions of position control and NC have been expanded based on surface observation function of friction force microscope (FFM). Precision positioning of cantilever was possible by using the displacement sensor in this system. Newly machining cantilever' with high stiffness was developed, and spinous single diamond grain was bonded on the end of this cantilever. Cantilevers for machining and measuring were able to exchange alternately. By using this system, 3D nano-machining and measuring was achieved.

Paper Details

Date Published: 19 May 2003
PDF: 2 pages
Proc. SPIE 10314, Optifab 2003: Technical Digest, 103140E (19 May 2003); doi: 10.1117/12.2284003
Show Author Affiliations
N. Kawasegi, Toyama Univ. (Japan)


Published in SPIE Proceedings Vol. 10314:
Optifab 2003: Technical Digest
Walter C. Czajkowski; Toshihide Dohi; Hans Lauth; Harvey M. Pollicove, Editor(s)

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