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Proceedings Paper

A vertical bi-directional electrostatic comb driver for optical MEMS devices
Author(s): S. He
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Paper Abstract

Micro electrostatic actuators play an important role in driving optical MEMS devices such as spatial light modulators, micro mirrors, and MEMS tunable lasers. The wide acceptance of electrostatic actuators is due in large to the fact that they are simple, they offer a fast response and low power consumption, and are potentially cheap when high volume is involved [ l ] -[3 ] .

Paper Details

Date Published: 29 August 2017
PDF: 3 pages
Proc. SPIE 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 103134L (29 August 2017); doi: 10.1117/12.2283961
Show Author Affiliations
S. He, Univ. of Toronto (Canada)


Published in SPIE Proceedings Vol. 10313:
Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging
John C. Armitage, Editor(s)

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