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Proceedings Paper

Development of MOEMS and micro optical components at INO
Author(s): Hubert Jerominek
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Paper Abstract

Aggressive R&D and commercialization programs targeting various types of micromirror-based micro-opto- electromechanical systems (MOEMS) have been realized at INO. These activities are accompanied by development of enabling technologies and selected micro-optical components such as various types of diffractive optical elements and refractive microlens arrays. Micro-optics technology development was considered essential for the manufacturing of functional devices and instruments making use of MOEMS. Moreover, a strong contribution from INO's optical design group was also solicited for the development of application specific optical and optomechanical components. These created a required critical mass for rapid development of selected manufacturing methods and particular components and devices. All the microfabrication activities are conducted in INO's 6,500 square foot clean room facility fully equipped for processing of Si and other material wafers with a diameter up to 150 mm.

Paper Details

Date Published: 29 August 2017
PDF: 3 pages
Proc. SPIE 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 103134D (29 August 2017); doi: 10.1117/12.2283953
Show Author Affiliations
Hubert Jerominek, INO (Canada)


Published in SPIE Proceedings Vol. 10313:
Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging
John C. Armitage, Editor(s)

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