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Proceedings Paper

Amorphous silicon TFT pulse bias induced metastability
Author(s): Kambiz Khodayari Moez
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Paper Abstract

Introduction Hydrogenated amorphous silicon thin film transistors (a-Si:H TFTs) are widely used as switching elements in liquid crystal displays (LCDs), imaging arrays and page-width printers that employ the active matrix addressing architecture. These devices, however, suffer from the electrical instability, when a prolonged voltage stress is applied to the TFT gate. This instability appears as a threshold voltage shift and degradation in subthreshold slope. Metastability of amorphous silicon TFTs under DC bias stress has been of interest in previous research, but less attention has been paid to the instabilities induced by pulse bias stress [5][6]. The study of pulse bias induced metastability of a-Si TFTs provides insight for designing circuits that are less sensitive or insensitive to instability. The results allow use of appropriate techniques to compensate for metastability, leading to less degradation from normal operation and longer lifetime for large area electronic systems. The paper presents results on pulse bias induced metastability of several a- Si:H inverted-staggered TFTs fabricated in-house at the University of Waterloo Microelectronics Laboratory using a 260°C fully wet-etch process.

Paper Details

Date Published: 29 August 2017
PDF: 3 pages
Proc. SPIE 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 1031347 (29 August 2017); doi: 10.1117/12.2283947
Show Author Affiliations
Kambiz Khodayari Moez, Univ. of Waterloo (Canada)


Published in SPIE Proceedings Vol. 10313:
Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging
John C. Armitage, Editor(s)

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